Design And Fabrication Process For Electrostatic Side-Drive Motors
Abbreviated Journal Title
J. Micromech. Microeng.
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.
Journal of Micromechanics and Microengineering
"Design And Fabrication Process For Electrostatic Side-Drive Motors" (1995). Faculty Bibliography 1990s. 1337.