Title

Design And Fabrication Process For Electrostatic Side-Drive Motors

Authors

Authors

A. G. Frangoul;K. B. Sundaram

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Micromech. Microeng.

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

Abstract

A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.

Journal Title

Journal of Micromechanics and Microengineering

Volume

5

Issue/Number

1

Publication Date

1-1-1995

Document Type

Article

DOI Link

http://dx.doi.org/10.1088/0960-1317/5/1/003

Language

English

First Page

11

Last Page

17

WOS Identifier

WOS:A1995QT49200003

ISSN

0960-1317

Recommended Citation

"Design And Fabrication Process For Electrostatic Side-Drive Motors" (1995). Faculty Bibliography 1990s. 1337.
https://stars.library.ucf.edu/facultybib1990/1337