Electropolishing of silicon using hydrazine
Abbreviated Journal Title
J. Mater. Sci.-Mater. Electron.
Engineering, Electrical & Electronic; Materials Science, ; Multidisciplinary; Physics, Applied; Physics, Condensed Matter
A new electropolishing technique has been investigated for polishing silicon using aqueous hydrazine. p-Type silicon samples are electropolished using this technique and the optimum experimental condition required to achieve this is suggested.
Journal of Materials Science-Materials in Electronics
"Electropolishing of silicon using hydrazine" (1997). Faculty Bibliography 1990s. 2108.