Title

Electrostatic discharge in semiconductor devices: An overview

Authors

Authors

J. E. Vinson;J. J. Liou

Comments

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Abbreviated Journal Title

Proc. IEEE

Keywords

electrical overstress; electrostatic discharge; empirical models; failure mechanisms; semiconductor devices; CMOS INTEGRATED-CIRCUITS; BASE BIAS STRESS; PROTECTION TECHNIQUES; FAILURE; ESD; RELIABILITY; DEGRADATION; MECHANISMS; BREAKDOWN; PULSES; Engineering, Electrical & Electronic

Abstract

Electrostatic discharge (ESD) is an event that sends current through an integrated circuit (IC). This paper reviews the impact of ESD on the IC industry and details the four stages of an ESD event: 1) charge generation, 2) charge transfer, 3) device response, and 4) device failure. Topics reviewed are charge generation mechanisms, models for ESD charge transfer electrical conduction mechanisms, and device damage mechanisms leading to circuit failure.

Journal Title

Proceedings of the Ieee

Volume

86

Issue/Number

2

Publication Date

1-1-1998

Document Type

Article

Language

English

First Page

399

Last Page

418

WOS Identifier

WOS:000071949000006

ISSN

0018-9219

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