Fabrication Of Saw 3-Phase Unidirectional Transducers Using Dielectric Crossovers
Abbreviated Journal Title
Surface Acoustic Wave Devices; Ultrasonics; Engineering, Electrical & Electronic
Two common dielectrics used for isolation in semiconductor device fabrication, spin on glass (SOG) and polyimide, are evaluated for the fabrication of dielectric supported crossover interconnections for surface acoustic wave (SAW) devices employing three-phase unidirectional transducers (TPUDTs). An all-aluminium reliable fabrication process was developed using polyimide.
"Fabrication Of Saw 3-Phase Unidirectional Transducers Using Dielectric Crossovers" (1993). Faculty Bibliography 1990s. 701.