Title

Microlens fabrication using an etched glass master

Authors

Authors

P. Zhang; G. Londe; J. Sung; E. Johnson; M. Lee;H. J. Cho

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Microsyst. Technol.

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied

Abstract

This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses.

Journal Title

Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems

Volume

13

Issue/Number

3-4

Publication Date

1-1-2007

Document Type

Article; Proceedings Paper

DOI Link

http://dx.doi.org/10.1007/s00542-006-0217-9

Language

English

First Page

339

Last Page

342

WOS Identifier

WOS:000243048500022

ISSN

0946-7076

Recommended Citation

"Microlens fabrication using an etched glass master" (2007). Faculty Bibliography 2000s. 21.
https://stars.library.ucf.edu/facultybib2000/21