Xenon-emission-spectra identification in the 5-20-nm spectral region in highly ionized xenon capillary-discharge plasmas
Abbreviated Journal Title
J. Opt. Soc. Am. B-Opt. Phys.
SOFT-X-RAY; EXTREME-ULTRAVIOLET; LITHOGRAPHY; Optics
We have identified intense extreme-ultraviolet emission spectra within the 5-20-nm wavelength region, originating from transitions in the Xe8+, Xe9+, Xe10+, and Xe11+ ion species, which were generated in high-current pulsed capillary discharges operating with xenon gas. We have also obtained a time-dependent estimate of the plasma electron temperature for these plasmas at peak pulsed current densities in the range of 400-800 kA/cm(2). (C) 2000 Optical Society of America [S0740-3224(00)01807-5].
Journal of the Optical Society of America B-Optical Physics
"Xenon-emission-spectra identification in the 5-20-nm spectral region in highly ionized xenon capillary-discharge plasmas" (2000). Faculty Bibliography 2000s. 2647.