Title

An improved model for substrate current of submicron MOSFETs

Authors

Authors

X. Gao; J. J. Liou; J. Bernier;G. Croft

Abbreviated Journal Title

Solid-State Electron.

Keywords

MOS device; substrate current; electrostatic discharge; impact; ionization; Engineering, Electrical & Electronic; Physics, Applied; Physics, ; Condensed Matter

Abstract

Substrate current is a good indicator for the hot-carrier and electrostatic discharge related reliability of MOSFET. This paper develops an improved and analytic model for such a Current based on the length of and maximum electric field in the high-field region near the drain junction. The present model is compared against several existing substrate current models reported in the literature. and results from device simulation and measurements are also included in support of the model development. (C) 2002 Elsevier Science Ltd. All rights reserved.

Journal Title

Solid-State Electronics

Volume

46

Issue/Number

9

Publication Date

1-1-2002

Document Type

Article

Language

English

First Page

1395

Last Page

1398

WOS Identifier

WOS:000177493800021

ISSN

0038-1101

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