The effects of oxidation on the optical properties of amorphous SiC films
Abbreviated Journal Title
Mater. Sci. Eng. B-Solid State Mater. Adv. Technol.
amorphous silicon carbide films; oxidation; optical properties; SILICON; Materials Science, Multidisciplinary; Physics, Condensed Matter
Amorphous silicon carbide films were deposited by the r.f. sputtering technique using a SiC target. The deposited films were annealed in dry oxygen ambient in the temperature range of 400-700 degreesC. Optical absorption studies indicated blue shifting effects as the annealing temperature was increased. (C) 2002 Elsevier Science B.V. All rights reserved.
Materials Science and Engineering B-Solid State Materials for Advanced Technology
"The effects of oxidation on the optical properties of amorphous SiC films" (2002). Faculty Bibliography 2000s. 3497.