Abbreviated Journal Title
J. Vac. Sci. Technol. B
Keywords
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
Journal Title
Journal of Vacuum Science & Technology B
Volume
21
Issue/Number
1
Publication Date
1-1-2003
Document Type
Article
DOI Link
Language
English
First Page
332
Last Page
334
WOS Identifier
ISSN
1071-1023
Recommended Citation
Gritz, Michael A.; Metzler, Meredith; Moser, Joel; Spencer, David; and Boreman, Glenn D., "Fabrication of air bridges using electron beam lithography" (2003). Faculty Bibliography 2000s. 3786.
https://stars.library.ucf.edu/facultybib2000/3786
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