Title

Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers

Authors

Authors

Y. Shen; I. B. Divliansky; D. N. Basov;S. Mookherjea

Comments

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Abbreviated Journal Title

Opt. Lett.

Keywords

PHOTONICS; Optics

Abstract

Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field-induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing. (C) 2011 Optical Society of America

Journal Title

Optics Letters

Volume

36

Issue/Number

14

Publication Date

1-1-2011

Document Type

Article

Language

English

First Page

2668

Last Page

2670

WOS Identifier

WOS:000293347000023

ISSN

0146-9592

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