Abbreviated Journal Title
Nanoscale Res. Lett.
Keywords
Porous silicon; Acoustic resonator; BAW filter; Acoustic Bragg mirror; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied
Abstract
We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
Journal Title
Nanoscale Research Letters
Volume
7
Publication Date
1-1-2012
Document Type
Article
Language
English
First Page
1
Last Page
6
WOS Identifier
ISSN
1931-7573
Recommended Citation
Aliev, Gazi N.; Goller, Bernhard; Snow, Paul A.; Heinrich, Helge; Yuan, Biao; and Aigner, Robert, "Porous silicon bulk acoustic wave resonator with integrated transducer" (2012). Faculty Bibliography 2010s. 2215.
https://stars.library.ucf.edu/facultybib2010/2215
Comments
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