Printed Sub-100 nm Polymer-Derived Ceramic Structures
Abbreviated Journal Title
ACS Appl. Mater. Interfaces
nanostructured ceramics; nanoimprinting; sub-100 nm ceramic structures; polymer-derived ceramics; SNAP technique; polyureasilazane; PRECERAMIC POLYMERS; NANOSTRUCTURES; FABRICATION; MICROELECTRONICS; MICROSTRUCTURES; FILMS; MEMS; SICN; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary
We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.
Acs Applied Materials & Interfaces
"Printed Sub-100 nm Polymer-Derived Ceramic Structures" (2013). Faculty Bibliography 2010s. 3920.