Demonstration of mid-infrared waveguide photonic crystal cavities
Abbreviated Journal Title
PHOTOTHERMAL SPECTROSCOPY; RING-RESONATOR; SILICON; MICROCAVITIES; FABRICATION; GLASSES; DESIGN; Optics
We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass (ChG) on CaF2 substrates by combing photolithographic patterning and focused ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 mu m wavelength, and a loaded quality factor of similar to 2000 was measured near the critical coupling regime. (C) 2013 Optical Society of America
"Demonstration of mid-infrared waveguide photonic crystal cavities" (2013). Faculty Bibliography 2010s. 4310.