Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators
Abbreviated Journal Title
PHOTONIC CRYSTAL CAVITIES; GE-SB-S; WAVE-GUIDES; PHOTOTHERMAL; SPECTROSCOPY; STRUCTURAL-PROPERTIES; FABRICATION; DESIGN; FILMS; Optics
We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 x 10(5) at 5.2 mu m wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. (C) 2013 Optical Society of America
"Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators" (2013). Faculty Bibliography 2010s. 4311.