Title

Comparison of crystal orientation mapping-based and image-based measurement of grain size and grain size distribution in a thin aluminum film

Authors

Authors

X. Liu; A. P. Warren; N. T. Nuhfer; A. D. Rollett; K. R. Coffey;K. Barmak

Comments

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Abbreviated Journal Title

Acta Mater.

Keywords

Transmission electron microscopy (TEM); Crystallographic orientation; Nanocrystalline aluminum; Grain size; Thin film; TRANSMISSION-ELECTRON-MICROSCOPE; BOUNDARY-CHARACTER-DISTRIBUTION; DIFFRACTION INTENSITIES; GROWTH; CONDUCTIVITY; COMPOSITES; Materials Science, Multidisciplinary; Metallurgy & Metallurgical; Engineering

Abstract

Crystal orientation maps of a nanocrystalline Al film were obtained using precession electron diffraction in a transmission electron microscope. The orientation maps were then subjected to a series of well-defined clean-up procedures for removal of badly indexed points and pseudosymmetry boundaries. The mean grain size and grain size distribution were obtained from the reconstructed boundary network. The grain size and grain size distribution were also measured by the conventional transmission electron microscopy brightfield-imaging-based hand-tracing methodology, and were compared quantitatively with the orientation mapping results. It was found that the mean grain size from the two methodologies agree within experimental error. On the other hand, the orientation mapping methodology produced a somewhat different grain size distribution compared with the distribution obtained by the hand-tracing methodology. The reasons for the differences in the distributions are discussed. (C) 2014 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Journal Title

Acta Materialia

Volume

79

Publication Date

1-1-2014

Document Type

Article

Language

English

First Page

138

Last Page

145

WOS Identifier

WOS:000342718400014

ISSN

1359-6454

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