High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates
Abbreviated Journal Title
Adv. Opt. Mater.
ROLL-TO-ROLL; GE-SB-S; WAVE-GUIDES; NANOIMPRINT LITHOGRAPHY; IMPRINT; LITHOGRAPHY; PHOTOTHERMAL SPECTROSCOPY; ROUGHNESS REDUCTION; SIDEWALL; ROUGHNESS; OPTICAL-PROPERTIES; SOFT-LITHOGRAPHY; Materials Science, Multidisciplinary; Optics
This paper reports a versatile technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss, sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra-high quality factor of 4 x 10 5 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub-micrometer nanoimprinting of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.
Advanced Optical Materials
"High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates" (2014). Faculty Bibliography 2010s. 6377.