Title

Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films

Authors

Authors

A. Prakash; V. Todi; K. B. Sundaram; L. Ross; G. H. Xu; M. French; P. Henry;S. W. King

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

ECS J. Solid State Sci. Technol.

Keywords

CHEMICAL-VAPOR-DEPOSITION; RAY PHOTOELECTRON-SPECTROSCOPY; BORON; CARBONITRIDE FILMS; BEAM-ASSISTED DEPOSITION; NITRIDE FILMS; SCHOTTKY-BARRIER; AMORPHOUS BORON; CARBIDE; CONSTANT; ADHESION; Materials Science, Multidisciplinary; Physics, Applied

Abstract

Boron carbon nitride (BCN) thin films were deposited by a dual target DC and RF sputtering technique. The films were deposited using various combinations of nitrogen and argon working gases and B4C, BN, and C targets. X-ray photoelectron spectroscopy and Fourier-transform infra-red spectroscopy were utilized, respectively, to investigate the changes in chemical composition and bonding that occurred for films deposited under various N-2/Ar gas flow ratios and DC/RF target powers. The composition and bonding were correlated to separate measurements of the BCN mass density, dielectric constant, Young's modulus, and hardness. All BCN films were observed to have relatively low mass densities ranging from 2.0-2.5 g/cm(3). BN rich BCN films were observed to be insulating with relatively low dielectric constants of 3.9-4.6 and Young's modulus and hardness values of 110-150 GPa and 5-13 GPa, respectively. BC rich BCN films were observed to be comparatively leaky dielectrics but did exhibit extreme mechanical properties with Young's modulus and hardness values exceeding in some cases 300 GPa and 30 GPa, respectively. (C) The Author(s) 2014. Published by ECS. All rights reserved.

Journal Title

Ecs Journal of Solid State Science and Technology

Volume

4

Issue/Number

1

Publication Date

1-1-2015

Document Type

Article

Language

English

First Page

N3122

Last Page

N3126

WOS Identifier

WOS:000349547900017

ISSN

2162-8769

Share

COinS