High Efficiency Collector for Laser Plasma EUV Source - (EP)
Collector optics for an EUV radiation source for collecting EUV radiation. The collector optics includes an elliptical dish reflector where light generated at a focal point of the reflector and is directed to a collection location. A frustal annual reflector is positioned around an outer edge of the dish reflector to collect more of the EUV radiation that may otherwise be lost. The radiation reflected by the annual reflector is directed to a center axicon reflector positioned between the focal point of the dish reflector and the collection location to redirect the radiation reflected by the annual reflector to be within a predetermined collection angle.
EP 1 475 807 B1
Application Serial Number
03 026 822.1
Assignee at Issuance
Assignee at Filing
Agency: Northrop Grumman Corporation
Foreign Filing Record
Arenberg, Jonathan, "High Efficiency Collector for Laser Plasma EUV Source - (EP)" (2008). UCF Patents. 226.