Study of sputtered tantalum pentoxide and aluminum oxide thin films and their multistacks for embedded capacitor applications
Aluminum oxide; Capacitors; Sputtering (Physics); Tantalum; Thin films
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Sundaram, Kalpathy B.
Master of Science (M.S.)
College of Engineering
Electrical Engineering and Computer Science
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Sood, Sumant, "Study of sputtered tantalum pentoxide and aluminum oxide thin films and their multistacks for embedded capacitor applications" (2003). Retrospective Theses and Dissertations. 1031.