Copper interconnect reliability on integrated circuits
Breakdown (Electricity), Copper, Interconnects (Integrated circuit technology)
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Yuan, Jiann S.
Doctor of Philosophy (Ph.D.)
College of Engineering and Computer Science
Electrical Engineering and Computer Science
Length of Campus-only Access
Doctoral Dissertation (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Wu, Wen, "Copper interconnect reliability on integrated circuits" (2002). Retrospective Theses and Dissertations. 1739.