Title

Effects Of Low Substrate Temperature And Ion Assisted Deposition On Composition, Optical Properties, And Stress Of Zns Thin Films

Abstract

ZnS thin films were deposited with and without ion assisted deposition onto substrates held at temperatures ranging from -120 to 50°C. Effects on chemical and crystalline composition, film microstructure, refractive index, stress, and waveguide losses were investigated. We observed that minimum stress and minimum losses occurred at the same deposition temperature (-50°C) in ZnS films, which also corresponded to a quenching of crystallinity. © 1989, Optical Society of America.

Publication Date

12-15-1989

Publication Title

Applied Optics

Volume

28

Issue

24

Number of Pages

5209-5214

Document Type

Article

Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.28.005209

Socpus ID

84975551776 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84975551776

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