Droplet Laser Plasma Sources Of Euv Radiation
An overview is given of the progress in the studies on a tin material limited-mass target which has demonstrated so far in-band conversion efficiencies in the range of ∼2%. The overall perspective of the developments required for laser plasmas to meet the requirements of the ITRS roadmap for EUV is outlined.
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Number of Pages
Article; Proceedings Paper
Source API URL
Richardson, Martin, "Droplet Laser Plasma Sources Of Euv Radiation" (2003). Scopus Export 2000s. 1323.