Nanofabrication Of Integrated Diffractive Optical Elements
Beam shaping; Diffraction grating; Electron beam lithography; Focused-ion beam; Semiconductor laser
We report on the design and fabrication of diffractive optical elements on high power broad area semiconductor lasers. Several issues related to the integrated diffractive elements fabrication by electron beam lithography and focused ion beam are discussed. We illustrate the flexibility of electron beam lithography by presenting results for beam focusing, splitting and tapering functions. An additional technique based on focused ion beam milling is presented for fabricating refractive lens elements onto the laser diode.
Proceedings of SPIE - The International Society for Optical Engineering
Number of Pages
Article; Proceedings Paper
Source API URL
Vaissié, Laurent; Mohammed, Waleed; and Johnson, Eric G., "Nanofabrication Of Integrated Diffractive Optical Elements" (2003). Scopus Export 2000s. 1757.