Electrostatically Actuated 1 × 2 Micro-Mechanical Optic Switch
A micro-opto-mechanical 1 × 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many potential applications in fibre-optic local area networks.
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Shubin, I. and Wa, P. L.K., "Electrostatically Actuated 1 × 2 Micro-Mechanical Optic Switch" (2001). Scopus Export 2000s. 280.