Antenna-Coupled Microbolometers On A Silicon-Nitride Membrane
Antenna-coupled detectors; Microbolometers; Responsivity; Silicon nitride membrane; Thermal impedance
Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and under vacuum, giving D* values of 3 × 10 6 cm√Hz/W and 1.7 × 10 7 cm√Hz/W, respectively. By using vanadium-oxide, values well above 1 × 10 8 cm√Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. © 2005 Wiley Periodicals, Inc.
Microwave and Optical Technology Letters
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González, F. J.; Ilic, B.; and Boreman, G. D., "Antenna-Coupled Microbolometers On A Silicon-Nitride Membrane" (2005). Scopus Export 2000s. 3061.