A Room Temperature Hydrogen Sensor With High Sensitivity And Selectivity Using Nanocrystalline Semiconductor Particles
Doped Sno 2; H sensor 2; MEMS; Nanoparticles
Micro hydrogen sensor with interdigitated electrodes and indium doped nanopolycrystalline SnO2 particles was fabricated and tested. Giant sensitivity as high as 105 with good repeatability and recovery was observed. The sensor showed an excellant selectivity of hydrogen (H2) sensing over helium (He). Copyright © 2005 by ASME.
American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Number of Pages
Article; Proceedings Paper
Source API URL
Zhang, Peng; Shukla, Satyajit; and Ludwig, Larry, "A Room Temperature Hydrogen Sensor With High Sensitivity And Selectivity Using Nanocrystalline Semiconductor Particles" (2005). Scopus Export 2000s. 3345.