Title

Copper plating process control by SEM

Authors

Authors

J. Akesson; S. Seal; S. Shukla;Z. Rahman

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Adv. Mater. Process.

Keywords

Materials Science, Multidisciplinary

Journal Title

Advanced Materials & Processes

Volume

160

Issue/Number

2

Publication Date

1-1-2002

Document Type

Article

Language

English

First Page

33

Last Page

35

WOS Identifier

WOS:000173712900004

ISSN

0882-7958

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