Title

Developing miniature nanostructured semiconductor-metal-oxide gas sensors

Authors

Authors

J. W. Gong;Q. F. Chen

Comments

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Abbreviated Journal Title

Sens. Mater.

Keywords

MEMS sensor; nanostructured SMO; ambient temperature; relative humidity; feedback control; TIN-OXIDE; RELATIVE-HUMIDITY; CARBON-MONOXIDE; WATER-VAPOR; SNO2; SENSITIVITY; ARRAY; NO2; CO; ELEMENTS; Instruments & Instrumentation; Materials Science, Multidisciplinary

Abstract

Micromachined nanostructured semiconductor-metal-oxide (SMO) gas sensors have proven promising in gas detection due to their improved sensitivity, robustness, simple signal processing, low fabrication cost and low energy consumption. However, the development of nanostructured micro-SMO sensors must not only satisfy performance-related requirements, but also face reliability-related challenges, particularly false alarm problems caused by environmentally induced drift and shift. In this article, we present results obtained in the development of a novel nanostructured micromachined SMO gas sensor and discuss the challenges in finding solutions to minimize the influences of environmental factors such as temperature, relative humidity, light and oxygen partial pressure.

Journal Title

Sensors and Materials

Volume

18

Issue/Number

4

Publication Date

1-1-2006

Document Type

Article

Language

English

First Page

183

Last Page

197

WOS Identifier

WOS:000241488900002

ISSN

0914-4935

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