Title

Scanning probe metrology in the presence of surface charge

Authors

Authors

J. E. Griffith; E. M. Kneedler; S. Ningen; A. Berghaus; C. E. Bryson; S. Pau; E. Houge;T. Shofner

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Vac. Sci. Technol. B

Keywords

FORCE MICROSCOPY; LOCALIZED CHARGE; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Abstract

Surface charge on insulating samples can be a significant source of error for scanning probe microscopes. We have found that it is possible to operate a scanning force microscope in a manner that makes it relatively immune to charge-induced forces while still allowing the probe tip to nondestructively follow the surface topography. The need to maintain close charge balance on the sample is thus obviated. We have used this strategy to perform critical dimension measurements on optical photomasks with the Surface/Interface Stylus NanoProfilometer. This instrument incorporates a servoed force-balance sensor. Surface topography is determined by touching the surface with contact forces between 0.1 and 1 muN. (C) 2000 American Vacuum Society. [S0734-211X(00)01706-6].

Journal Title

Journal of Vacuum Science & Technology B

Volume

18

Issue/Number

6

Publication Date

1-1-2000

Document Type

Article; Proceedings Paper

Language

English

First Page

3264

Last Page

3267

WOS Identifier

WOS:000165935800124

ISSN

1071-1023

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