Title

Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8

Authors

Authors

H. E. Williams; D. J. Freppon; S. M. Kuebler; R. C. Rumpf;M. A. Melino

Comments

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Abbreviated Journal Title

Opt. Express

Keywords

X-RAY-LITHOGRAPHY; PHOTORESIST; RESIST; FEATURES; BEAM; MEMS; Optics

Abstract

A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-linked material is mechanically robust, chemically resistant, and optically transparent. Yet, procedures commonly used to process SU-8, particularly spin-coating, are impractical when the intended fabrication substrate is the end-face of an optical fiber. A melt-reflow process was developed to prepare optical fibers having SU-8 resin deposited at controlled thickness on the fiber end-face. Multi-photon direct laser writing was then used to fabricate various refractive lenses, a compound lens system, and a woodpile photonic crystal within the resin on the end-face of the optical fiber. Data are presented that show how the refractive lenses can be used to alter the output of the optical fiber. This work opens a new path to low-profile integrated photonic devices. (C) 2011 Optical Society of America

Journal Title

Optics Express

Volume

19

Issue/Number

23

Publication Date

1-1-2011

Document Type

Article

Language

English

First Page

22910

Last Page

22922

WOS Identifier

WOS:000296904700071

ISSN

1094-4087

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