Porous silicon bulk acoustic wave resonator with integrated transducer
Abbreviated Journal Title
Nanoscale Res. Lett.
Porous silicon; Acoustic resonator; BAW filter; Acoustic Bragg mirror; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied
We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
Nanoscale Research Letters
"Porous silicon bulk acoustic wave resonator with integrated transducer" (2012). Faculty Bibliography 2010s. 2215.