Title

Porous silicon bulk acoustic wave resonator with integrated transducer

Authors

Authors

G. N. Aliev; B. Goller; P. A. Snow; H. Heinrich; B. A. Yuan;R. Aigner

Comments

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Abbreviated Journal Title

Nanoscale Res. Lett.

Keywords

Porous silicon; Acoustic resonator; BAW filter; Acoustic Bragg mirror; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied

Abstract

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

Journal Title

Nanoscale Research Letters

Volume

7

Publication Date

1-1-2012

Document Type

Article

Language

English

First Page

1

Last Page

6

WOS Identifier

WOS:000309180900001

ISSN

1931-7573

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