Title

On electric conduction of amorphous silicon carbonitride derived from a polymeric precursor

Authors

Authors

Y. H. Chen; F. Q. Yang;L. N. An

Comments

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Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

CERAMICS; TEMPERATURE; COMPOSITES; TRANSPORT; STRESS; MEMS; Physics, Applied

Abstract

A long-existing problem that the conductivity of amorphous silicon carbonitrides derived from polymeric precursor increases significantly with pyrolysis temperature is investigated. We show that the conductivity exhibited an Arrhenius dependence on pyrolysis temperature, with the activation energy of similar to 3.41 eV. Structural analysis using Raman spectroscopy reveals that the free carbon within the material undergoes a sp(3)-to-sp(2) transition as pyrolysis temperature increases, with the activation energy of similar to 3.6 eV. We conclude that the pyrolysis-temperature induced increase in the conductivity is mainly due to the increase in the conductivity of the free carbon. A simple model is proposed to correlate the two. (C) 2013 AIP Publishing LLC.

Journal Title

Applied Physics Letters

Volume

102

Issue/Number

23

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

4

WOS Identifier

WOS:000320622600030

ISSN

0003-6951

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