Abstract

An angular pumped and emitting capillary(APEC) discharge light source having a blocking electrode installed on the axis of the capillary just beyond the end of the capillary bore. Thus, the emitting region occurs in an angular fashion between the end of the capillary and the blocking electrode. The blocking electrode prevents debris generated within the capillary from being expelled onto collecting optics for the discharge source. A second version shapes the blocking electrode into a trap so that emitted debris will be collected within the trap. Alternatively, the trap can be a collector separate and apart from the electrodes of the light source. The capillary bore and electrode configuration allow for emissions to be enhanced by placing the electrode in front of the outlet to the capillary bore. A still another version has a discharge source without a capillary bore where gas flows through a first electrode to a space in front of a second electrode to generate a discharge therebetween

Document Type

Patent

Patent Number

US 6,232,613

Application Serial Number

09/141,737

Issue Date

5-15-2001

Current Assignee

Agency: Extreme Ultraviolet (EUV), LLC

Assignee at Issuance

UCFRF

College

College of Optics and Photonics

Department

CREOL

Allowance Date

1-17-2001

Filing Date

8-27-1998

Assignee at Filing

UCFRF

Filing Type

Nonprovisional Application Record

Donated

no

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