Title
Oxidation behavior of a fully dense polymer-derived amorphous silicon carbonitride ceramic
Abbreviated Journal Title
J. Am. Ceram. Soc.
Keywords
SINGLE-CRYSTAL SILICON; C-N CERAMICS; MECHANICAL-PROPERTIES; HIGH-TEMPERATURE; SICN MEMS; PRECURSOR; KINETICS; FABRICATION; PYROLYSIS; CARBIDE; Materials Science, Ceramics
Abstract
The oxidation behavior of a polymer-derived amorphous silicon carbonitride (SiCN) ceramic was studied at temperature range of 900degrees-1200degreesC using fully dense samples, which were obtained using a novel pressure-assisted pyrolysis technique. The oxidation kinetics was investigated by measuring the thickness of oxide layers. The data were found to fit a typical parabolic kinetics. The measured oxidation rate constant and activation energy of the SiCN are close to those of CVD and single-crystal SiC. The results suggest that the oxidation mechanism of the SiCN is the same as that of SiC: oxygen diffusion through a silica layer.
Journal Title
Journal of the American Ceramic Society
Volume
87
Issue/Number
3
Publication Date
1-1-2004
Document Type
Article
Language
English
First Page
483
Last Page
486
WOS Identifier
ISSN
0002-7820
Recommended Citation
"Oxidation behavior of a fully dense polymer-derived amorphous silicon carbonitride ceramic" (2004). Faculty Bibliography 2000s. 4216.
https://stars.library.ucf.edu/facultybib2000/4216
Comments
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