13.5 nm EUV generation from tin-doped droplets using a fiber laser
Abbreviated Journal Title
EXTREME-ULTRAVIOLET LITHOGRAPHY; X-RAY-EMISSION; PLASMA SOURCE; DEBRIS; Optics
A comprehensive study of the spectral and Mo-Si mirror in-band EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported. With pre-pulse enhancement, in-band conversion efficiency of approximately 2.1% is measured for laser irradiance intensities near 8 x 10(10) W/cm(2). This is the first study to be reported that uses a high-power, high repetition rate fiber laser with the high repetition rate droplet targets where EUV generation from plasmas is measured. (c) 2007 Optical Society of America.
"13.5 nm EUV generation from tin-doped droplets using a fiber laser" (2007). Faculty Bibliography 2000s. 7155.