Authors

S. A. George; K. C. Hou; K. Takenoshita; A. Galvanauskas;M. C. Richardson

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Opt. Express

Keywords

EXTREME-ULTRAVIOLET LITHOGRAPHY; X-RAY-EMISSION; PLASMA SOURCE; DEBRIS; Optics

Abstract

A comprehensive study of the spectral and Mo-Si mirror in-band EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported. With pre-pulse enhancement, in-band conversion efficiency of approximately 2.1% is measured for laser irradiance intensities near 8 x 10(10) W/cm(2). This is the first study to be reported that uses a high-power, high repetition rate fiber laser with the high repetition rate droplet targets where EUV generation from plasmas is measured.

Journal Title

Optics Express

Volume

15

Issue/Number

25

Publication Date

1-1-2007

Document Type

Article

Language

English

First Page

16348

Last Page

16356

WOS Identifier

WOS:000251624800008

ISSN

1094-4087

Share

COinS