A simplified Monte-Carlo calculation to model ion-solid interactions in the classroom
Abbreviated Journal Title
Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms
ion-solid interactions; accelerator based teaching; Monte-Carlo; calculation; activity based course; Instruments & Instrumentation; Nuclear Science & Technology; Physics, ; Atomic, Molecular & Chemical; Physics, Nuclear
We have developed an Ion-Solid Interaction course, for graduate and undergraduate students, which combines lecture, experimental work, and computational modeling. The lectures cover the basic physical principles necessary to understand the interactions of energetic ions with solids, as well as practical technological applications such as sputtering (deposition, patterning, depth profiling), ion beam analysis, and ion implantation. The experiments involve the fabrication of thin films by sputtering deposition and their characterization by ion beam analysis, as well as other techniques. In the computational modeling the students develop a 'TRIM-like' or Monte-Carlo calculation to determine the various parameters associated with the slowing down and penetration of ions in solids. In doing so they have the opportunity to put into practice most of the basic concepts learned in class. We describe here this computational modeling, and present examples of calculations performed by the students. (c) 2007 Published by Elsevier B.V.
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
Article; Proceedings Paper
"A simplified Monte-Carlo calculation to model ion-solid interactions in the classroom" (2007). Faculty Bibliography 2000s. 7302.