A simplified Monte-Carlo calculation to model ion-solid interactions in the classroom

    Authors

    K. Kitanovski;G. Braunstein

    Comments

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    Abbreviated Journal Title

    Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms

    Keywords

    ion-solid interactions; accelerator based teaching; Monte-Carlo; calculation; activity based course; Instruments & Instrumentation; Nuclear Science & Technology; Physics, ; Atomic, Molecular & Chemical; Physics, Nuclear

    Abstract

    We have developed an Ion-Solid Interaction course, for graduate and undergraduate students, which combines lecture, experimental work, and computational modeling. The lectures cover the basic physical principles necessary to understand the interactions of energetic ions with solids, as well as practical technological applications such as sputtering (deposition, patterning, depth profiling), ion beam analysis, and ion implantation. The experiments involve the fabrication of thin films by sputtering deposition and their characterization by ion beam analysis, as well as other techniques. In the computational modeling the students develop a 'TRIM-like' or Monte-Carlo calculation to determine the various parameters associated with the slowing down and penetration of ions in solids. In doing so they have the opportunity to put into practice most of the basic concepts learned in class. We describe here this computational modeling, and present examples of calculations performed by the students. (c) 2007 Published by Elsevier B.V.

    Journal Title

    Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

    Volume

    261

    Issue/Number

    1-2

    Publication Date

    1-1-2007

    Document Type

    Article; Proceedings Paper

    Language

    English

    First Page

    255

    Last Page

    257

    WOS Identifier

    WOS:000248784100065

    ISSN

    0168-583X

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