The effect of substrate temperature and source flux on cubic ZnMgO UV sensors grown by plasma-enhanced molecular beam epitaxy
Abbreviated Journal Title
Appl. Surf. Sci.
Optoelectronics; Cubic ZnMgO; Oxide MBE; Deep ultraviolet; THIN-FILMS; ZNO; Chemistry, Physical; Materials Science, Coatings & Films; Physics, ; Applied; Physics, Condensed Matter
Cubic ZnMgO films were grown by plasma-enhanced molecular beam epitaxy on MgO substrates. Inter-digitatal metal-semiconductor-metal contacts were fabricated with Ni/Mg/Au to investigate the effect of growth temperature and source flux ratio on UV sensor properties. Device spectral responsivity was found to decrease with increasing Mg content, while UV-visible rejection ratio correspondingly increased. Peak responsivities ranged from 236 nm to 260 nm, spanning from 10 mA/W in the single crystal, high Mg case to similar to 500 A/W for phase segregated films. UV-visible rejection ratios increased with increasing Mg content to three orders of magnitude. Solar blind detectors were realized with single-crystal ZnMgO, while effective visible blind detectors were made with phase-segregated ZnMgO films. (C) 2013 Elsevier B. V. All rights reserved.
Applied Surface Science
"The effect of substrate temperature and source flux on cubic ZnMgO UV sensors grown by plasma-enhanced molecular beam epitaxy" (2013). Faculty Bibliography 2010s. 3731.