The effect of substrate temperature and source flux on cubic ZnMgO UV sensors grown by plasma-enhanced molecular beam epitaxy

    Authors

    R. C. Boutwell; M. Wei;W. V. Schoenfeld

    Comments

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    Abbreviated Journal Title

    Appl. Surf. Sci.

    Keywords

    Optoelectronics; Cubic ZnMgO; Oxide MBE; Deep ultraviolet; THIN-FILMS; ZNO; Chemistry, Physical; Materials Science, Coatings & Films; Physics, ; Applied; Physics, Condensed Matter

    Abstract

    Cubic ZnMgO films were grown by plasma-enhanced molecular beam epitaxy on MgO substrates. Inter-digitatal metal-semiconductor-metal contacts were fabricated with Ni/Mg/Au to investigate the effect of growth temperature and source flux ratio on UV sensor properties. Device spectral responsivity was found to decrease with increasing Mg content, while UV-visible rejection ratio correspondingly increased. Peak responsivities ranged from 236 nm to 260 nm, spanning from 10 mA/W in the single crystal, high Mg case to similar to 500 A/W for phase segregated films. UV-visible rejection ratios increased with increasing Mg content to three orders of magnitude. Solar blind detectors were realized with single-crystal ZnMgO, while effective visible blind detectors were made with phase-segregated ZnMgO films. (C) 2013 Elsevier B. V. All rights reserved.

    Journal Title

    Applied Surface Science

    Volume

    284

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    254

    Last Page

    257

    WOS Identifier

    WOS:000324248600036

    ISSN

    0169-4332

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