The effect of substrate temperature and source flux on cubic ZnMgO UV sensors grown by plasma-enhanced molecular beam epitaxy

    Authors

    R. C. Boutwell; M. Wei;W. V. Schoenfeld

    Comments

    Authors: contact us about adding a copy of your work at [email protected]

    Abbreviated Journal Title

    Appl. Surf. Sci.

    Keywords

    Optoelectronics; Cubic ZnMgO; Oxide MBE; Deep ultraviolet; THIN-FILMS; ZNO; Chemistry, Physical; Materials Science, Coatings & Films; Physics, ; Applied; Physics, Condensed Matter

    Abstract

    Cubic ZnMgO films were grown by plasma-enhanced molecular beam epitaxy on MgO substrates. Inter-digitatal metal-semiconductor-metal contacts were fabricated with Ni/Mg/Au to investigate the effect of growth temperature and source flux ratio on UV sensor properties. Device spectral responsivity was found to decrease with increasing Mg content, while UV-visible rejection ratio correspondingly increased. Peak responsivities ranged from 236 nm to 260 nm, spanning from 10 mA/W in the single crystal, high Mg case to similar to 500 A/W for phase segregated films. UV-visible rejection ratios increased with increasing Mg content to three orders of magnitude. Solar blind detectors were realized with single-crystal ZnMgO, while effective visible blind detectors were made with phase-segregated ZnMgO films. (C) 2013 Elsevier B. V. All rights reserved.

    Journal Title

    Applied Surface Science

    Volume

    284

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    254

    Last Page

    257

    WOS Identifier

    WOS:000324248600036

    ISSN

    0169-4332

    Share

    COinS
     

    Accessibility Statement

    This item was created or digitized prior to April 24, 2027, or is a reproduction of legacy media created before that date. It is preserved in its original, unmodified state specifically for research, reference, or historical recordkeeping. In accordance with the ADA Title II Final Rule, the University Libraries provides accessible versions of archival materials upon request. To request an accommodation for this item, please submit an accessibility request form.