Design, analysis and simulation of a microcompressor driven by a vertical comb-drive actuator
Microactuators, Microelectromechanical systems
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Doctor of Philosophy (Ph.D.)
College of Engineering
Mechanical, Materials, and Aerospace Engineering
Length of Campus-only Access
Doctoral Dissertation (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Hao, Zhili, "Design, analysis and simulation of a microcompressor driven by a vertical comb-drive actuator" (2000). Retrospective Theses and Dissertations. 1861.