Fundamentals of Microfabrication and Nanotechnology, Volume I-III, 3rd Edition

Fundamentals of Microfabrication and Nanotechnology, Volume I-III, 3rd Edition

Authors

Marc Madou

Files

Link to Full Text

Link to Library Sourced Electronic Textbook

Publication Date

2011

Course Number

EML 5290

Course Title

Introduction to MEMS and Micromachining

Instructors

Hyoung Jin Cho

Instructor emails

hjcho@ucf.edu

Course College

College of Engineering & Computer Sciences

Course Department

Mechanical & Aerospace Engineering

Type

Library-Sourced

Platform

Taylor & Francis

Status

Owned

License

Unlimited User Access (Owned)

Print ISBN

9781351990615

Electronic ISBN

9781315274164

Usage

Active

Fundamentals of Microfabrication and Nanotechnology, Volume I-III, 3rd Edition


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