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Fundamentals of Microfabrication and Nanotechnology, Volume I-III, 3rd Edition
Files
Link to Full Text
Link to Library Sourced Electronic Textbook
Publication Date
2011
Course Number
EML 5290
Course Title
Introduction to MEMS and Micromachining
Instructors
Hyoung Jin Cho
Instructor emails
hjcho@ucf.edu
Course College
College of Engineering & Computer Sciences
Course Department
Mechanical & Aerospace Engineering
Type
Library-Sourced
Platform
Taylor & Francis
Status
Owned
License
Unlimited User Access (Owned)
Print ISBN
9781351990615
Electronic ISBN
9781315274164
Usage
Active
Recommended Citation
Madou, Marc, "Fundamentals of Microfabrication and Nanotechnology, Volume I-III, 3rd Edition" (2011). eTextbooks for Students. 785.
https://stars.library.ucf.edu/etextbooks/785
![Fundamentals of Microfabrication and Nanotechnology, Volume I-III, 3rd Edition](https://stars.library.ucf.edu/etextbooks/1771/thumbnail.jpg)