Modeling The Image Quality Of Enhanced Reflectance X-Ray Multilayers As A Surface Power Spectral Density Filter Function

    Authors

    J. E. Harvey

    Comments

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    Abbreviated Journal Title

    Appl. Optics

    Keywords

    X-RAY MULTILAYERS; MULTILAYER SCATTERING; INTERFACE CORRELATION; SURFACE; PSD FILTER FUNCTION; LIGHT-SCATTERING; PERFORMANCE; COATINGS; ROUGHNESS; MIRRORS; OPTICS; Optics

    Abstract

    Residual surface roughness over the entire range of relevant spatial frequencies must be specified and controlled in many high-performance optical systems. This is particularly true for enhanced reflectance multilayers if both high reflectance and high spatial resolution are desired. If we assume that the interfaces making up a multilayer coating are uncorrelated at high spatial frequencies (microroughness) and perfectly correlated at low spatial and midspatial frequencies, then the multilayer can be thought of as a surface power spectral density (PSD) filter function. Multilayer coatings thus behave as a low-pass spatial frequency filter acting on the substrate PSD, with the exact location and shape of this cutoff being material and process dependent. This concept allows us to apply conventional linear systems techniques to the evaluation of image quality and to the derivation of optical fabrication tolerances for applications utilizing enhanced reflectance x-ray multilayers.

    Journal Title

    Applied Optics

    Volume

    34

    Issue/Number

    19

    Publication Date

    1-1-1995

    Document Type

    Article

    Language

    English

    First Page

    3715

    Last Page

    3726

    WOS Identifier

    WOS:A1995RE61500022

    ISSN

    0003-6935

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