Performance Predictions Of A Schwarzschild Imaging Microscope For Soft X-Ray Applications

    Authors

    J. E. Harvey; K. L. Lewotsky;A. Kotha

    Comments

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    Abbreviated Journal Title

    Opt. Eng.

    Keywords

    soft x-ray microscopes; surface scattering effects; image analysis; STATISTICAL PROPERTIES; OPTICAL-SURFACES; MULTILAYERS; SCATTERING; Optics

    Abstract

    The design of a Schwarzschild imaging microscope for soft x-ray applications has been reported by Hoover and Shealy. Based upon a geometrical ray-trace analysis of the residual design errors, diffraction-limited performance at a wavelength of 100 Angstrom was predicted over an object size (diameter) of 0.4 mm. We expand on the analysis of that design by determining the total image degradation due to diffraction, geometrical aberrations, and scattering effects due to residual optical fabrication errors. A linear systems treatment of surface scattering phenomena is used to model the image degradation effects of surface irregularities over the entire range of relevant spatial frequencies. This includes small angle scattering effects due to mid spatial frequency surface errors falling between the traditional ''figure'' and ''finish'' specifications. The implementation of this scattering theory as a general performance prediction code is validated by excellent agreement with limited test data for a different Schwarzschild microscope at a wavelength of 73 Angstrom. Finally, image quality predictions are presented parametrically to provide insight into the optical fabrication tolerances necessary to meet desired image quality requirements. (C) 1996 Society of Photo-Optical Instrumentation Engineers.

    Journal Title

    Optical Engineering

    Volume

    35

    Issue/Number

    8

    Publication Date

    1-1-1996

    Document Type

    Article

    Language

    English

    First Page

    2423

    Last Page

    2436

    WOS Identifier

    WOS:A1996VD09100043

    ISSN

    0091-3286

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