Title

Performance Predictions Of A Schwarzschild Imaging Microscope For Soft X-Ray Applications

Authors

Authors

J. E. Harvey; K. L. Lewotsky;A. Kotha

Comments

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Abbreviated Journal Title

Opt. Eng.

Keywords

soft x-ray microscopes; surface scattering effects; image analysis; STATISTICAL PROPERTIES; OPTICAL-SURFACES; MULTILAYERS; SCATTERING; Optics

Abstract

The design of a Schwarzschild imaging microscope for soft x-ray applications has been reported by Hoover and Shealy. Based upon a geometrical ray-trace analysis of the residual design errors, diffraction-limited performance at a wavelength of 100 Angstrom was predicted over an object size (diameter) of 0.4 mm. We expand on the analysis of that design by determining the total image degradation due to diffraction, geometrical aberrations, and scattering effects due to residual optical fabrication errors. A linear systems treatment of surface scattering phenomena is used to model the image degradation effects of surface irregularities over the entire range of relevant spatial frequencies. This includes small angle scattering effects due to mid spatial frequency surface errors falling between the traditional ''figure'' and ''finish'' specifications. The implementation of this scattering theory as a general performance prediction code is validated by excellent agreement with limited test data for a different Schwarzschild microscope at a wavelength of 73 Angstrom. Finally, image quality predictions are presented parametrically to provide insight into the optical fabrication tolerances necessary to meet desired image quality requirements. (C) 1996 Society of Photo-Optical Instrumentation Engineers.

Journal Title

Optical Engineering

Volume

35

Issue/Number

8

Publication Date

1-1-1996

Document Type

Article

Language

English

First Page

2423

Last Page

2436

WOS Identifier

WOS:A1996VD09100043

ISSN

0091-3286

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