Title

Electropolishing of silicon using hydrazine

Authors

Authors

K. B. Sundaram;V. H. Desai

Comments

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Abbreviated Journal Title

J. Mater. Sci.-Mater. Electron.

Keywords

Engineering, Electrical & Electronic; Materials Science, ; Multidisciplinary; Physics, Applied; Physics, Condensed Matter

Abstract

A new electropolishing technique has been investigated for polishing silicon using aqueous hydrazine. p-Type silicon samples are electropolished using this technique and the optimum experimental condition required to achieve this is suggested.

Journal Title

Journal of Materials Science-Materials in Electronics

Volume

8

Issue/Number

2

Publication Date

1-1-1997

Document Type

Article

Language

English

First Page

99

Last Page

101

WOS Identifier

WOS:A1997WU94400008

ISSN

0957-4522

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