Electropolishing of silicon using hydrazine

    Authors

    K. B. Sundaram;V. H. Desai

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    J. Mater. Sci.-Mater. Electron.

    Keywords

    Engineering, Electrical & Electronic; Materials Science, ; Multidisciplinary; Physics, Applied; Physics, Condensed Matter

    Abstract

    A new electropolishing technique has been investigated for polishing silicon using aqueous hydrazine. p-Type silicon samples are electropolished using this technique and the optimum experimental condition required to achieve this is suggested.

    Journal Title

    Journal of Materials Science-Materials in Electronics

    Volume

    8

    Issue/Number

    2

    Publication Date

    1-1-1997

    Document Type

    Article

    Language

    English

    First Page

    99

    Last Page

    101

    WOS Identifier

    WOS:A1997WU94400008

    ISSN

    0957-4522

    Share

    COinS