3.0.co;2-q" >http://dx.doi.org/10.1002/(sici)1097-0029(19980515)41:4<285::aid-jemt1>3.0.co;2-q

">
 

Title

Applications of the FIB lift-out technique for TEM specimen preparation

Authors

Authors

L. A. Giannuzzi; J. L. Drown; S. R. Brown; R. B. Irwin;F. Stevie

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Microsc. Res. Tech.

Keywords

SiC; Si; galvanized steel; Fe-Zn; ZnSe; metals; ceramics; integrated; circuit; TRANSMISSION ELECTRON-MICROSCOPY; FOCUSED ION-BEAM; COMBINATION; Anatomy & Morphology; Biology; Microscopy

Abstract

A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bulk sample. Micromanipulation Lift-out procedures were then used to transport the electron-transparent specimen to a carbon-coated copper grid for subsequent TEM analysis. The FIB (focused ion beam) lift-out technique is a fast method for the preparation of site-specific TEM. specimens. The versatility of this technique is demonstrated by presenting cross-sectioned TEN specimens from several types of materials systems, including a multi-layered integrated circuit on a Si substrate, a galvanized steel, a polycrystalline SiC ceramic fiber, and a ZnSe optical ceramic. These specimens have both complex surface geometry and interfaces with complex chemistry. FIB milling was performed sequentially through different layers of cross-sectioned materials so that preferential sputtering was not a factor in preparing TEM specimens. The FIB lift-out method for TEM analysis is a useful technique for the study of complex materials systems for TEM analysis. (C) 1998 Wiley-Liss, Inc.

Journal Title

Microscopy Research and Technique

Volume

41

Issue/Number

4

Publication Date

1-1-1998

Document Type

Article

Language

English

First Page

285

Last Page

290

WOS Identifier

WOS:000073891600001

ISSN

1059-910X

Share

COinS