SAW device modeling including velocity dispersion based on ZnO/Diamond/Si layered structures

    Authors

    A. Hachigo;D. C. Malocha

    Comments

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    Abbreviated Journal Title

    IEEE Trans. Ultrason. Ferroelectr. Freq. Control

    Keywords

    MATRIX-METHODS; MULTILAYERS; WAVES; Acoustics; Engineering, Electrical & Electronic

    Abstract

    Surface acoustic wave (SAW) filter properties of ZnO/Diamond/Si structures are calculated including velocity dispersion. The conventional SAW device modeling has previously been developed for bulk substrates. However, layered materials exhibit SAW velocity dispersion. The null frequency band width of typical layered ZnO/Diamond/Si structures is narrower than that calculated by conventional SAW device modeling techniques due to the velocity dispersion of the layered structures. The null frequency band width of layered structures was calculated by the delta function model and the equivalent circuit model, including velocity dispersion, and compared with the experimental results. The dispersive equivalent circuit (DEC) model for layered structures is also presented. The results of these analysis are compared with the experimental results which show very good agreement.

    Journal Title

    Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control

    Volume

    45

    Issue/Number

    3

    Publication Date

    1-1-1998

    Document Type

    Article

    Language

    English

    First Page

    660

    Last Page

    666

    WOS Identifier

    WOS:000073912500014

    ISSN

    0885-3010

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