Title

SAW device modeling including velocity dispersion based on ZnO/Diamond/Si layered structures

Authors

Authors

A. Hachigo;D. C. Malocha

Comments

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Abbreviated Journal Title

IEEE Trans. Ultrason. Ferroelectr. Freq. Control

Keywords

MATRIX-METHODS; MULTILAYERS; WAVES; Acoustics; Engineering, Electrical & Electronic

Abstract

Surface acoustic wave (SAW) filter properties of ZnO/Diamond/Si structures are calculated including velocity dispersion. The conventional SAW device modeling has previously been developed for bulk substrates. However, layered materials exhibit SAW velocity dispersion. The null frequency band width of typical layered ZnO/Diamond/Si structures is narrower than that calculated by conventional SAW device modeling techniques due to the velocity dispersion of the layered structures. The null frequency band width of layered structures was calculated by the delta function model and the equivalent circuit model, including velocity dispersion, and compared with the experimental results. The dispersive equivalent circuit (DEC) model for layered structures is also presented. The results of these analysis are compared with the experimental results which show very good agreement.

Journal Title

Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control

Volume

45

Issue/Number

3

Publication Date

1-1-1998

Document Type

Article

Language

English

First Page

660

Last Page

666

WOS Identifier

WOS:000073912500014

ISSN

0885-3010

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