Growth Of (100) Oriented Diamond Thin-Films On Ball Structure Diamond-Like Particles

    Authors

    L. Chow; A. Horner; H. Sakouri; B. Roughani;S. Sundaram

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Keywords

    Chemical-Vapor-Deposition; Materials Science, Multidisciplinary

    Abstract

    The morphology of typical CVD diamond thin films has been shown to be controlled by the concentration of methane during deposition. For example, for CH4 concentrations c < 0.4% the (111) faces dominate, while at 0.4% < c < 1.2% (100) faces dominate. Here we showed that the (100) oriented diamond films can be grown on top of the microcrystalline ball-like particles under suitable conditions. These (100) oriented diamond films are grown under the condition of 1.5% methane in hydrogen, substrate temperature of 680-degrees-C-750-degrees-C, and pressure of 30-80 Torr. The bombardment of the diamond thin films by ions in the plasma is believed to be an important factor for the formation of (100) oriented films on top of the ball-like particles. SEM, Raman, and x-ray techniques were used to characterize the deposited (100) oriented diamond thin films.

    Journal Title

    Journal of Materials Research

    Volume

    7

    Issue/Number

    7

    Publication Date

    1-1-1992

    Document Type

    Note

    Language

    English

    First Page

    1606

    Last Page

    1609

    WOS Identifier

    WOS:A1992JD17100003

    ISSN

    0884-2914

    Share

    COinS