Characterization And Optimization Of Cerium Dioxide Films Deposited By Rf Magnetron Sputtering

    Authors

    K. B. Sundaram; P. F. Wahid;P. J. Sisk

    Comments

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    Abbreviated Journal Title

    Thin Solid Films

    Keywords

    Thin-Films; Materials Science, Multidisciplinary; Materials Science, Coatings &; Films; Physics, Applied; Physics, Condensed Matter

    Abstract

    Cerium dioxide (CeO2) films were deposited on glass substrates by an r.f. magnetron sputtering process. The deposition rates were studied as a function of the molar fraction of oxygen in the system for various input power levels. The deposition conditions were optimized to obtain good quality films for optical transmission.

    Journal Title

    Thin Solid Films

    Volume

    221

    Issue/Number

    1-2

    Publication Date

    1-1-1992

    Document Type

    Article

    Language

    English

    First Page

    13

    Last Page

    16

    WOS Identifier

    WOS:A1992KD61100004

    ISSN

    0040-6090

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