Fabrication Of Saw 3-Phase Unidirectional Transducers Using Dielectric Crossovers

    Authors

    M. E. Garrity;S. M. Richie

    Comments

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    Abbreviated Journal Title

    Electron. Lett.

    Keywords

    Surface Acoustic Wave Devices; Ultrasonics; Engineering, Electrical & Electronic

    Abstract

    Two common dielectrics used for isolation in semiconductor device fabrication, spin on glass (SOG) and polyimide, are evaluated for the fabrication of dielectric supported crossover interconnections for surface acoustic wave (SAW) devices employing three-phase unidirectional transducers (TPUDTs). An all-aluminium reliable fabrication process was developed using polyimide.

    Journal Title

    Electronics Letters

    Volume

    29

    Issue/Number

    9

    Publication Date

    1-1-1993

    Document Type

    Article

    Language

    English

    First Page

    801

    Last Page

    802

    WOS Identifier

    WOS:A1993LN17600047

    ISSN

    0013-5194

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